@misc{indiciae6f8c3a5eee86,
  title = {Effects of deposition temperature on the mechanical and structural properties of amorphous Al-Si-O thin films prepared by RF magnetron sputtering},
  author = {Stefan Karlsson and Per Eklund and Lars Österlund and Jens Birch and Sharafat Ali},
  year = {2023},
  url = {https://arxiv.org/abs/2306.15965},
  note = {Source identifier: 2306.15965}
}