TY  - RPRT
TI  - Effects of deposition temperature on the mechanical and structural properties of amorphous Al-Si-O thin films prepared by RF magnetron sputtering
AU  - Stefan Karlsson
AU  - Per Eklund
AU  - Lars Österlund
AU  - Jens Birch
AU  - Sharafat Ali
PY  - 2023
UR  - https://arxiv.org/abs/2306.15965
ID  - 2306.15965
ER  -