@misc{indiciae59f0fe3bd54e,
  title = {High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices},
  author = {E. V. Zikiy and A. I. Ivanov and N. S. Smirnov and D. O. Moskalev and V. I. Polozov and A. R. Matanin and E. I. Malevannaya and V. V. Echeistov and T. G. Konstantinova and I. A. Rodionov},
  year = {2023},
  url = {https://arxiv.org/abs/2306.16301},
  note = {Source identifier: 2306.16301}
}