@misc{indiciae58ff36ea44bc, title = {Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing}, author = {Chengli Wang and Zihan Li and Johann Riemensberger and Grigory Lihachev and Mikhail Churaev and Wil Kao and Xinru Ji and Terence Blesin and Alisa Davydova and Yang Chen and Xi Wang and Kai Huang and Xin Ou and Tobias J. Kippenberg}, year = {2023}, doi = {10.1038/s41586-024-07369-1}, url = {https://arxiv.org/abs/2306.16492}, note = {Source identifier: 2306.16492} }