@misc{indiciae0c1ccf70ae06,
  title = {PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth},
  author = {Teresa de los Arcos and Peter Awakowicz and Jan Benedikt and Beatrix Biskup and Marc Böke and Nils Boysen and Rahel Buschhaus and Rainer Dahlmann and Anjana Devi and Tobias Gergs and Jonathan Jenderny and Achim von Keudell and Thomas D. Kühne and Simon Kusmierz and Hendrik Müller and Thomas Mussenbrock and Jan Trieschmann and David Zanders and Frederik Zysk and Guido Grundmeier},
  year = {2023},
  url = {https://arxiv.org/abs/2307.00011},
  note = {Source identifier: 2307.00011}
}