@misc{indiciae396d13e027aa,
  title = {Improved Parameter Targeting in 3D-Integrated Superconducting Circuits through a Polymer Spacer Process},
  author = {Graham J. Norris and Laurent Michaud and David Pahl and Michael Kerschbaum and Christopher Eichler and Jean-Claude Besse and Andreas Wallraff},
  year = {2023},
  doi = {10.1140/epjqt/s40507-023-00213-x},
  url = {https://arxiv.org/abs/2307.00046},
  note = {Source identifier: 2307.00046}
}