TY  - RPRT
TI  - Improved Parameter Targeting in 3D-Integrated Superconducting Circuits through a Polymer Spacer Process
AU  - Graham J. Norris
AU  - Laurent Michaud
AU  - David Pahl
AU  - Michael Kerschbaum
AU  - Christopher Eichler
AU  - Jean-Claude Besse
AU  - Andreas Wallraff
PY  - 2023
DO  - 10.1140/epjqt/s40507-023-00213-x
UR  - https://arxiv.org/abs/2307.00046
ID  - 2307.00046
ER  -