@misc{indiciaed76124874038,
  title = {Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics},
  author = {Thor August Schimmell Weis and Babak Vosoughi Lahijani and Konstantinos Tsoukalas and Marcus Albrechtsen and Søren Stobbe},
  year = {2023},
  url = {https://arxiv.org/abs/2307.01122},
  note = {Source identifier: 2307.01122}
}