TY  - RPRT
TI  - Design, fabrication, and characterization of electrostatic comb-drive actuators for nanoelectromechanical silicon photonics
AU  - Thor August Schimmell Weis
AU  - Babak Vosoughi Lahijani
AU  - Konstantinos Tsoukalas
AU  - Marcus Albrechtsen
AU  - Søren Stobbe
PY  - 2023
UR  - https://arxiv.org/abs/2307.01122
ID  - 2307.01122
ER  -