TY  - RPRT
TI  - Isotropic plasma-thermal atomic layer etching of superconducting TiN films using sequential exposures of molecular oxygen and SF$_6/$H$_2$ plasma
AU  - Azmain A. Hossain
AU  - Haozhe Wang
AU  - David S. Catherall
AU  - Martin Leung
AU  - Harm C. M. Knoops
AU  - James R. Renzas
AU  - Austin J. Minnich
PY  - 2023
DO  - 10.1116/6.0002965
UR  - https://arxiv.org/abs/2307.02821
ID  - 2307.02821
ER  -