@misc{indiciae907fc39e3981,
  title = {Fabrication and Characterization of AlN-based, CMOS compatible Piezo-MEMS Devices},
  author = {Shubham Jadhav and Rudra Pratap},
  year = {2023},
  url = {https://arxiv.org/abs/2307.03366},
  note = {Source identifier: 2307.03366}
}