TY  - RPRT
TI  - Fabrication and Characterization of AlN-based, CMOS compatible Piezo-MEMS Devices
AU  - Shubham Jadhav
AU  - Rudra Pratap
PY  - 2023
UR  - https://arxiv.org/abs/2307.03366
ID  - 2307.03366
ER  -