@misc{indiciaea78b835e6344,
  title = {A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics},
  author = {Nahid Hosseini and Matthias Neuenschwander and Jonathan D. Adams and Santiago H. Andany and Oliver Peric and Marcel Winhold and Maria Carmen Giordano and Vinayak Shantaram Bhat and Dirk Grundler and Georg E. Fantner},
  year = {2023},
  url = {https://arxiv.org/abs/2307.05221},
  note = {Source identifier: 2307.05221}
}