TY  - RPRT
TI  - A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics
AU  - Nahid Hosseini
AU  - Matthias Neuenschwander
AU  - Jonathan D. Adams
AU  - Santiago H. Andany
AU  - Oliver Peric
AU  - Marcel Winhold
AU  - Maria Carmen Giordano
AU  - Vinayak Shantaram Bhat
AU  - Dirk Grundler
AU  - Georg E. Fantner
PY  - 2023
UR  - https://arxiv.org/abs/2307.05221
ID  - 2307.05221
ER  -