@misc{indiciae6ba8c2d96b24, title = {Fabrication of nanopatterned metal layers on silicon by nanoindentation / nanoscratching and electrodeposition}, author = {R. Cecchini and A. Fabrizi and C. Paternoster and W. Zhang and G. Roventi}, year = {2023}, doi = {10.1016/j.electacta.2010.01.024}, url = {https://arxiv.org/abs/2307.07800}, note = {Source identifier: 2307.07800} }