TY  - RPRT
TI  - Fabrication of nanopatterned metal layers on silicon by nanoindentation / nanoscratching and electrodeposition
AU  - R. Cecchini
AU  - A. Fabrizi
AU  - C. Paternoster
AU  - W. Zhang
AU  - G. Roventi
PY  - 2023
DO  - 10.1016/j.electacta.2010.01.024
UR  - https://arxiv.org/abs/2307.07800
ID  - 2307.07800
ER  -