TY - RPRT TI - Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas AU - Aranka Derzsi AU - Mate Vass AU - Ranna Masheyeva AU - Benedek Horvath AU - Zoltan Donko AU - Peter Hartmann PY - 2023 UR - https://arxiv.org/abs/2307.10319 ID - 2307.10319 ER -