TY - RPRT TI - FlexDelta: A flexure-based fully decoupled parallel $xyz$ positioning stage with long stroke AU - Qianjun Zhang AU - Wei Dong AU - Qingsong Xu AU - Bimal J. Goteea AU - Yongzhuo Gao PY - 2023 UR - https://arxiv.org/abs/2307.11774 ID - 2307.11774 ER -