@misc{indiciaef7c3a73f9416,
  title = {Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits},
  author = {Thomas M. Hazard and Wayne Woods and Danna Rosenberg and Rabi Das and Cyrus F. Hirjibehedin and David K. Kim and Jeffery Knecht and Justin Mallek and Alexander Melville and Bethany M. Niedzielski and Kyle Serniak and Katrina M. Sliwa and Donna Ruth-Yost and Jonilyn L. Yoder and William D. Oliver and Mollie E. Schwartz},
  year = {2023},
  url = {https://arxiv.org/abs/2308.00834},
  note = {Source identifier: 2308.00834}
}