@misc{indiciae41ec40f6d6da,
  title = {Super stealth dicing of transparent solids with nanometric precision},
  author = {Zhen-Ze Li and Hua Fan and Lei Wang and Xu Zhang and Xin-Jing Zhao and Yan-Hao Yu and Yi-Shi Xu and Yi Wang and Xiao-Jie Wang and Saulius Juodkazis and Qi-Dai Chen and Hong-Bo Sun},
  year = {2024},
  doi = {10.1038/s41566-024-01437-8},
  url = {https://arxiv.org/abs/2308.02352},
  note = {Source identifier: 2308.02352}
}