@misc{indiciaea26b393a6867,
  title = {Improved placement precision of implanted donor spin qubits in silicon using molecule ions},
  author = {Danielle Holmes and Benjamin Wilhelm and Alexander M. Jakob and Xi Yu and Fay E. Hudson and Kohei M. Itoh and Andrew S. Dzurak and David N. Jamieson and Andrea Morello},
  year = {2023},
  doi = {10.1002/qute.202300316},
  url = {https://arxiv.org/abs/2308.04117},
  note = {Source identifier: 2308.04117}
}