@misc{indiciaea85aaca35cda,
  title = {Nanomechanical inhomogeneities in CVA-deposited titanium nitride thin films: Nanoindentation and Finite Element Method Investigations},
  author = {Neeraj Kumar Sharma and Anchal Rana and O. S. Panwar and Abhimanyu Singh Rana},
  year = {2023},
  url = {https://arxiv.org/abs/2308.07083},
  note = {Source identifier: 2308.07083}
}