TY  - RPRT
TI  - Nanomechanical inhomogeneities in CVA-deposited titanium nitride thin films: Nanoindentation and Finite Element Method Investigations
AU  - Neeraj Kumar Sharma
AU  - Anchal Rana
AU  - O. S. Panwar
AU  - Abhimanyu Singh Rana
PY  - 2023
UR  - https://arxiv.org/abs/2308.07083
ID  - 2308.07083
ER  -