@misc{indiciaed6b820e1c8b2, title = {SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection}, author = {Vic De Ridder and Bappaditya Dey and Enrique Dehaerne and Sandip Halder and Stefan De Gendt and Bartel Van Waeyenberge}, year = {2023}, url = {https://arxiv.org/abs/2308.07180}, note = {Source identifier: 2308.07180} }