TY - RPRT TI - SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection AU - Vic De Ridder AU - Bappaditya Dey AU - Enrique Dehaerne AU - Sandip Halder AU - Stefan De Gendt AU - Bartel Van Waeyenberge PY - 2023 UR - https://arxiv.org/abs/2308.07180 ID - 2308.07180 ER -