TY  - RPRT
TI  - Inverse Lithography Physics-informed Deep Neural Level Set for Mask Optimization
AU  - Xing-Yu Ma
AU  - Shaogang Hao
PY  - 2023
DO  - 10.1364/ao.503332
UR  - https://arxiv.org/abs/2308.12299
ID  - 2308.12299
ER  -