@misc{indiciae149eb750f052,
  title = {Highly \$\{ \}\textasciicircum{}\{28\} \textbackslash{}mathrm\{Si\}\$ Enriched Silicon by Localised Focused Ion Beam Implantation},
  author = {Ravi Acharya and Maddison Coke and Mason Adshead and Kexue Li and Barat Achinuq and Rongsheng Cai and A. Baset Gholizadeh and Janet Jacobs and Jessica L. Boland and Sarah J. Haigh and Katie L. Moore and David N. Jamieson and Richard J. Curry},
  year = {2023},
  url = {https://arxiv.org/abs/2308.12471},
  note = {Source identifier: 2308.12471}
}