@misc{indiciae54047fa71947,
  title = {Defects and Oxygen Impurities in Ferroelectric Wurtzite Al\$\_\{1-x\}\$Sc\$\_x\$N Alloys},
  author = {Naseem Ud Din and Cheng-Wei Lee and Geoff L. Brennecka and Prashun Gorai},
  year = {2023},
  url = {https://arxiv.org/abs/2308.14310},
  note = {Source identifier: 2308.14310}
}