@misc{indiciaea949855833b5,
  title = {In-situ Plasma Studies using a Direct Current Microplasma in a Scanning Electron Microscope},
  author = {Lukas Grünewald and Dmitry Chezganov and Robin De Meyer and Andrey Orekhov and Sandra Van Aert and Annemie Bogaerts and Sara Bals and Jo Verbeeck},
  year = {2023},
  doi = {10.1002/admt.202301632},
  url = {https://arxiv.org/abs/2308.15123},
  note = {Source identifier: 2308.15123}
}