@misc{indiciaef12fc1184b35,
  title = {"Zero change" platform for monolithic back-end-of-line integration of phase change materials in silicon photonics},
  author = {Maoliang Wei and Kai Xu and Bo Tang and Junying Li and Yiting Yun and Peng Zhang and Yingchun Wu and Kangjian Bao and Kunhao Lei and Zequn Chen and Hui Ma and Chunlei Sun and Ruonan Liu and Ming Li and Lan Li and Hongtao Lin},
  year = {2023},
  url = {https://arxiv.org/abs/2308.15723},
  note = {Source identifier: 2308.15723}
}