@misc{indiciaedcba808b1420,
  title = {Atomistic insights into ultrafast SiGe nanoprocessing},
  author = {Gaetano Calogero and Domenica Raciti and Damiano Ricciarelli and Pablo Acosta-Alba and Fuccio Cristiano and Richard Daubriac and Remi Demoulin and Ioannis Deretzis and Giuseppe Fisicaro and Jean-Michel Hartmann and Sébastien Kerdilès and Antonino La Magna},
  year = {2023},
  doi = {10.1021/acs.jpcc.3c05999},
  url = {https://arxiv.org/abs/2309.02909},
  note = {Source identifier: 2309.02909}
}