@misc{indiciae126d8e369fc1,
  title = {Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride},
  author = {Sinwoo Cho and Omar Barrera and Pietro Simeoni and Emily N. Marshall and Jack Kramer and Keisuke Motoki and Tzu-Hsuan Hsu and Vakhtang Chulukhadze and Matteo Rinaldi and W. Alan Doolittle and Ruochen Lu},
  year = {2023},
  doi = {10.1109/jmems.2023.3321284},
  url = {https://arxiv.org/abs/2309.03135},
  note = {Source identifier: 2309.03135}
}