@misc{indiciae575a442d06d2,
  title = {Anneal-free ultra-low loss silicon nitride integrated photonics},
  author = {Debapam Bose and Mark W. Harrington and Andrei Isichenko and Kaikai Liu and Jiawei Wang and Zachary L. Newman and Daniel J. Blumenthal},
  year = {2024},
  doi = {10.1038/s41377-024-01503-4},
  url = {https://arxiv.org/abs/2309.04070},
  note = {Source identifier: 2309.04070}
}