@misc{indiciae18545ce17391,
  title = {Forward simulation of coherent beams on grating structures for coherent scatterometry},
  author = {Martin Hammerschmidt and Lin Zschiedrich and Lauryna Siaudinyté and Phillip Manley and Philipp-Immanuel Schneider and Sven Burger},
  year = {2023},
  doi = {10.1117/12.2673231},
  url = {https://arxiv.org/abs/2309.06109},
  note = {Source identifier: 2309.06109}
}