TY  - RPRT
TI  - Forward simulation of coherent beams on grating structures for coherent scatterometry
AU  - Martin Hammerschmidt
AU  - Lin Zschiedrich
AU  - Lauryna Siaudinyté
AU  - Phillip Manley
AU  - Philipp-Immanuel Schneider
AU  - Sven Burger
PY  - 2023
DO  - 10.1117/12.2673231
UR  - https://arxiv.org/abs/2309.06109
ID  - 2309.06109
ER  -