@misc{indiciae8242fd3f4236,
  title = {Generative Pre-Training of Time-Series Data for Unsupervised Fault Detection in Semiconductor Manufacturing},
  author = {Sewoong Lee and JinKyou Choi and Min Su Kim},
  year = {2024},
  url = {https://arxiv.org/abs/2309.11427},
  note = {Source identifier: 2309.11427}
}