TY  - RPRT
TI  - Generative Pre-Training of Time-Series Data for Unsupervised Fault Detection in Semiconductor Manufacturing
AU  - Sewoong Lee
AU  - JinKyou Choi
AU  - Min Su Kim
PY  - 2024
UR  - https://arxiv.org/abs/2309.11427
ID  - 2309.11427
ER  -