@misc{indiciae12e9a1441c0e,
  title = {FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing},
  author = {Jingjie Wu and Lei Zhou},
  year = {2023},
  url = {https://arxiv.org/abs/2309.11735},
  note = {Source identifier: 2309.11735}
}