TY  - RPRT
TI  - FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing
AU  - Jingjie Wu
AU  - Lei Zhou
PY  - 2023
UR  - https://arxiv.org/abs/2309.11735
ID  - 2309.11735
ER  -