@misc{indiciaeee3db3cb9560,
  title = {Development of a Selective Wet-Chemical Etchant for 3D Structuring of Silicon via Nonlinear Laser Lithography},
  author = {Mona Zolfaghari Borra and Behrad Radfar and Hisham Nasser and Tahir Çolakoğlu and Onur Tokel and Ahmet Turnalı and Merve Demirtaş and Hande Ustunel and Daniele Toffoli and F. Ömer İlday and Raşit Turan and Ihor Pavlov and Alpan Bek},
  year = {2023},
  url = {https://arxiv.org/abs/2309.12328},
  note = {Source identifier: 2309.12328}
}