TY  - RPRT
TI  - Direct in- and out-of-plane writing of metals on insulators by electron-beam-enabled, confined electrodeposition with submicrometer feature size
AU  - Mirco Nydegger
AU  - Zhu-Jun Wang
AU  - Marc Willinger
AU  - Ralph Spolenak
AU  - Alain Reiser
PY  - 2023
DO  - 10.1002/smtd.202301247
UR  - https://arxiv.org/abs/2309.12824
ID  - 2309.12824
ER  -