@misc{indiciae2df4054c455e,
  title = {Kinetic Simulation of He radio frequency capacitive coupled plasma},
  author = {M. Shihab and A. Elbadawy and M. S. Afify and N. El-Siragy},
  year = {2023},
  url = {https://arxiv.org/abs/2309.16368},
  note = {Source identifier: 2309.16368}
}