TY  - RPRT
TI  - Kinetic Simulation of He radio frequency capacitive coupled plasma
AU  - M. Shihab
AU  - A. Elbadawy
AU  - M. S. Afify
AU  - N. El-Siragy
PY  - 2023
UR  - https://arxiv.org/abs/2309.16368
ID  - 2309.16368
ER  -