@misc{indiciae2b21371e05f1,
  title = {Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator},
  author = {Cheng Zheng and Guangyuan Zhao and Peter T. C. So},
  year = {2023},
  url = {https://arxiv.org/abs/2309.17343},
  note = {Source identifier: 2309.17343}
}