TY  - RPRT
TI  - Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator
AU  - Cheng Zheng
AU  - Guangyuan Zhao
AU  - Peter T. C. So
PY  - 2023
UR  - https://arxiv.org/abs/2309.17343
ID  - 2309.17343
ER  -