@misc{indiciae3dc34193725d,
  title = {Resistless EUV lithography: photon-induced oxide patterning on silicon},
  author = {Li-Ting Tseng and Prajith Karadan and Dimitrios Kazazis and Procopios C. Constantinou and Taylor J. Z. Stock and Neil J. Curson and Steven R. Schofield and Matthias Muntwiler and Gabriel Aeppli and Yasin Ekinci},
  year = {2023},
  doi = {10.1126/sciadv.adf5997},
  url = {https://arxiv.org/abs/2310.01268},
  note = {Source identifier: 2310.01268}
}