TY  - RPRT
TI  - Resistless EUV lithography: photon-induced oxide patterning on silicon
AU  - Li-Ting Tseng
AU  - Prajith Karadan
AU  - Dimitrios Kazazis
AU  - Procopios C. Constantinou
AU  - Taylor J. Z. Stock
AU  - Neil J. Curson
AU  - Steven R. Schofield
AU  - Matthias Muntwiler
AU  - Gabriel Aeppli
AU  - Yasin Ekinci
PY  - 2023
DO  - 10.1126/sciadv.adf5997
UR  - https://arxiv.org/abs/2310.01268
ID  - 2310.01268
ER  -