@misc{indiciaec1a8b00fa9d6, title = {Multi-physics modeling of non-equilibrium phenomena in inductively coupled plasma discharges: Part I. A state-to-state approach}, author = {Sanjeev Kumar and Alessandro Munafo and Sung Min Jo and Marco Panesi}, year = {2023}, doi = {10.1088/1361-6463/ad80a4}, url = {https://arxiv.org/abs/2310.02214}, note = {Source identifier: 2310.02214} }