TY  - RPRT
TI  - Multi-physics modeling of non-equilibrium phenomena in inductively coupled plasma discharges: Part I. A state-to-state approach
AU  - Sanjeev Kumar
AU  - Alessandro Munafo
AU  - Sung Min Jo
AU  - Marco Panesi
PY  - 2023
DO  - 10.1088/1361-6463/ad80a4
UR  - https://arxiv.org/abs/2310.02214
ID  - 2310.02214
ER  -