TY  - RPRT
TI  - High-speed photonic crystal modulator with non-volatile memory via structurally-engineered strain concentration in a piezo-MEMS platform
AU  - Y. Henry Wen
AU  - David Heim
AU  - Matthew Zimmermann
AU  - Roman A. Shugayev
AU  - Mark Dong
AU  - Andrew J. Leenheer
AU  - Gerald Gilbert
AU  - Matt Eichenfield
AU  - Mikkel Heuck
AU  - Dirk R. Englund
PY  - 2023
UR  - https://arxiv.org/abs/2310.07798
ID  - 2310.07798
ER  -